Detection of Printable EUV Mask Absorber Defects and Defect Adders by Full Chip Optical Inspection of EUV Patterned Wafers
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Variation in phase defect size on extreme ultraviolet mask before and after reflective multilayer coating: Journal of Vacuum Science & Technology B: Vol 33, No 6
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Residual-type mask defect printability for extreme ultraviolet lithography: Journal of Vacuum Science & Technology B: Vol 30, No 6
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Machines | Free Full-Text | Mask-Guided Generation Method for Industrial Defect Images with Non-uniform Structures
Detection of Printable EUV Mask Absorber Defects and Defect Adders by Full Chip Optical Inspection of EUV Patterned Wafers
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