Sputtering Sources
Magnetron sputtering
Section III Sputtering © 1998, Angus Rockett. - ppt download
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The sputtering system: 1—cylindrical stainless-steel chamber; 2—cathode; 3—circular anode
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Movable cylindrical magnetron sputtering source
Nanostructure of Rutile TiO2 Thin Films Prepared on Unheated Substrate by Dual Cathode DC Unbalanced Magnetron Sputtering
Hollow cathode effect modified time-dependent global model and high-power impulse magnetron sputtering discharge and transport in cylindrical cathode: Journal of Applied Physics: Vol 125, No 6
Magnetron sputtering sources in the cylindrical configuration. (a)... | Download Scientific Diagram
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